Robotics: Science and Systems I
Micro and Nanorobotic Assembly Using Dielectrophoresis
Arunkumar Subramanian, Barmeshwar Vikramaditya, Lixin Dong, Dominik Bell, Bradley J. NelsonAbstract: The contact phase of an assembly task involving micro and nano objects is complicated by the presence of surface and intermolecular forces such as electrostatic, surface-tension and Van der Waals forces. Assembly strategies must account for the presence of these forces in order to guarantee successful repeatable micro and nanoassemblies with high precision. A detailed model for this electrostatic interaction is developed and analyzed. Based on the results of this analysis, dielectrophoretic assembly principles of MEMS/NEMS devices are proposed and experimentally verified with microtweezers for micro Ni parts and with nanoelectrodes fabricated with electron-beam lithography for carbon nanotube assembly. The successful manipulation and assembly of single carbon nanotubes (CNTs) using dielectrophoretic forces produced by nanoelectrodes will lead to a higher integration of CNTs into both nanoelectronics and NEMS.
Bibtex:
@INPROCEEDINGS{ Subramanian-RSS-05, AUTHOR = {Arunkumar Subramanian and Barmeshwar Vikramaditya and Lixin Dong and Dominik Bell and Bradley J. Nelson}, TITLE = {Micro and Nanorobotic Assembly Using Dielectrophoresis}, BOOKTITLE = {Proceedings of Robotics: Science and Systems}, YEAR = {2005}, ADDRESS = {Cambridge, USA}, MONTH = {June}, DOI = {10.15607/RSS.2005.I.043} }